The MEMS program has at its core the research and development of advanced MEMS devices and processes. These projects can be roughly categorized in four areas: fluid sensing and control, inertial measurement units, electromagnetic/optical beam steering, and distributed networks of sensors and actuators. In addition, the program is also building an infrastructure for MEMS technology by developing design and simulation tools, affordable fabrication services for users in industry and academia, manufacturing equipment, and test and characterization instruments. Recent accomplishments of the ARPA program include the demonstration of an accelerometer operating at near 80,000 g's, optical diffraction gratings that electromechanically switch light in 40 nanoseconds, and a fabrication service that has already provided hundreds of distributed users from diverse backgrounds with affordable access to micromachining processes at regular, scheduled intervals.
MEMS is a natural progression in the capabilities of semiconductor devices. The ability of MEMS to gather and process information, decide on a course of action, and control the environment through actuators increases the affordability, functionality, and number of smart systems. The enhanced capability of smart systems enabled by MEMS will increasingly be the product differentiator of the 21st century, pacing the level of both defense and commercial competitiveness.
The ESTO Program Manager for this effort is:
Dr. Kaigham J. Gabriel (703) 696-2252 (phone), (703) 696-2203 (fax), and email: kgabriel@arpa.mil
Last revised 4/12/95